Name

Lithography/Micro-fab/Material-sputtering facility

Service

Lithographic pattering, magnetron sputtering, polishing

Specification

Class-1000 Cleanroom, class-100 lithographic room, fiber polisher, wafer polisher

Contact

Head of Facilities: Prof. Yen-Chieh Huang

+886-3-5162340, ychuang@ee.nthu.edu.tw

Contact Window: Mr. Cang-He Guo

+886-3-5162333, harrykuo369@gmail.com

Photo